JPH0574901B2 - - Google Patents

Info

Publication number
JPH0574901B2
JPH0574901B2 JP60034372A JP3437285A JPH0574901B2 JP H0574901 B2 JPH0574901 B2 JP H0574901B2 JP 60034372 A JP60034372 A JP 60034372A JP 3437285 A JP3437285 A JP 3437285A JP H0574901 B2 JPH0574901 B2 JP H0574901B2
Authority
JP
Japan
Prior art keywords
electrode
electrodes
ion source
ions
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60034372A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61195550A (ja
Inventor
Shinya Sekimoto
Isao Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60034372A priority Critical patent/JPS61195550A/ja
Publication of JPS61195550A publication Critical patent/JPS61195550A/ja
Publication of JPH0574901B2 publication Critical patent/JPH0574901B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60034372A 1985-02-25 1985-02-25 イオン源 Granted JPS61195550A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60034372A JPS61195550A (ja) 1985-02-25 1985-02-25 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60034372A JPS61195550A (ja) 1985-02-25 1985-02-25 イオン源

Publications (2)

Publication Number Publication Date
JPS61195550A JPS61195550A (ja) 1986-08-29
JPH0574901B2 true JPH0574901B2 (en]) 1993-10-19

Family

ID=12412338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60034372A Granted JPS61195550A (ja) 1985-02-25 1985-02-25 イオン源

Country Status (1)

Country Link
JP (1) JPS61195550A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0724205B2 (ja) * 1986-10-08 1995-03-15 株式会社日立製作所 イオンビ−ムの加工装置
JP5589916B2 (ja) * 2011-03-17 2014-09-17 日新イオン機器株式会社 スリット電極及びこれを備えた荷電粒子ビーム発生装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740246U (en]) * 1980-08-15 1982-03-04
JPS5778800A (en) * 1980-11-04 1982-05-17 Hitachi Ltd Ion source for netral particle incident device

Also Published As

Publication number Publication date
JPS61195550A (ja) 1986-08-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees